As an R&D center for integration of micro-systems, we aim, through cooperation with industry, to promote the development of micro-system integration techniques, and to contribute to the strengthening of Japan's international competitiveness in the field of integrated circuits. In addition, we aim to apply the technologies in diverse fields such as information-communication, manufacturing, and medicine. ohoku University's Micro System Integration Center was formed to create scientific and technological innovations in the domain of advanced integration, working under the aegis of the Special Coordination Funds for Promoting Science and Technology program of Japan's Ministry of Education, Culture, Sports, Science and Technology. The center houses two primary organizations: the Micro System Integration R&D Division (Principal Investigator: Takahito Ono), currently embarked on a ten-year plan launched in 2007, and the Micro System Integration R&D Group (Core researcher: Masayoshi Esashi), embarked on four-year mission under the World-Leading Innovative R&D Support program.